Lindstrom, R.
, Simons, D.
, Bennett, R.
, Benbalagh, R.
, MacDonald, B.
, Chew, A.
, Gehre, D.
, Hasegawa, H.
, Hitzman, C.
, Ko, J.
, Magee, C.
, Montgomery, N.
, Peres, P.
, Ronsheim, P.
, Yoshikawa, S.
, Schuhmacher, M.
, Stockwell, W.
, Sykes, D.
, Tomita, M.
, Toujou, F.
and Won, J.
(2006),
Round-Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS, Applied Surface Science
(Accessed May 3, 2024)
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Round-Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS
Published
Author(s)
, , , R. Benbalagh, , A. Chew, D. Gehre, H Hasegawa, C. Hitzman, J. Ko, C W. Magee, N. Montgomery, P. Peres, P. Ronsheim, S. Yoshikawa, M. Schuhmacher, W. Stockwell, D. Sykes, M. Tomita, F. Toujou, J. Won
Citation
Applied Surface Science
Volume
252
Issue
19
Pub Type
Journals
Citation
Created November 1, 2006, Updated February 17, 2017