Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Round-Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS

Published

Author(s)

Richard M. Lindstrom, David S. Simons, R Bennett, R. Benbalagh, Bruce S. MacDonald, A. Chew, D. Gehre, H Hasegawa, C. Hitzman, J. Ko, C W. Magee, N. Montgomery, P. Peres, P. Ronsheim, S. Yoshikawa, M. Schuhmacher, W. Stockwell, D. Sykes, M. Tomita, F. Toujou, J. Won
Citation
Applied Surface Science
Volume
252
Issue
19

Citation

Lindstrom, R. , Simons, D. , Bennett, R. , Benbalagh, R. , MacDonald, B. , Chew, A. , Gehre, D. , Hasegawa, H. , Hitzman, C. , Ko, J. , Magee, C. , Montgomery, N. , Peres, P. , Ronsheim, P. , Yoshikawa, S. , Schuhmacher, M. , Stockwell, W. , Sykes, D. , Tomita, M. , Toujou, F. and Won, J. (2006), Round-Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS, Applied Surface Science (Accessed June 24, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 1, 2006, Updated February 17, 2017