Resonating torque microbalance for in situ measurements of ferromagnetic films
John M. Moreland, James A. Beall, Stephen E. Russek
We describe an instrument for in situ monitoring of the magnetic moment of a thin film during deposition with sub-monolayer sensitivity. The instrument measures the magnetic torque on a film as it is being deposited onto a microcantilever excited near its mechanical resonance. Dynamic feedback is used to balance the magnetic torque by applying a mechanical force at the base of the cantilever.