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Residual Defects in SIMOX: Threading Dislocations and Pipes, Technical Abstracts

Published

Author(s)

Peter Roitman, Monica D. Edelstein, S. J. Krause, S. Visitserngtrakul
Proceedings Title
1990 IEEE SOS/SOI Technology Conference
Conference Dates
October 2-4, 1990
Conference Location
Key West, FL, USA

Citation

Roitman, P. , Edelstein, M. , Krause, S. and Visitserngtrakul, S. (1990), Residual Defects in SIMOX: Threading Dislocations and Pipes, Technical Abstracts, 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA (Accessed July 15, 2024)

Issues

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Created December 30, 1990, Updated October 12, 2021