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Residual Defects in SIMOX: Threading Dislocations and Pipes, Technical Abstracts
Published
Author(s)
Peter Roitman, Monica D. Edelstein, S. J. Krause, S. Visitserngtrakul
Proceedings Title
1990 IEEE SOS/SOI Technology Conference
Conference Dates
October 2-4, 1990
Conference Location
Key West, FL, USA
Pub Type
Conferences
Citation
Roitman, P.
, Edelstein, M.
, Krause, S.
and Visitserngtrakul, S.
(1990),
Residual Defects in SIMOX: Threading Dislocations and Pipes, Technical Abstracts, 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA
(Accessed October 9, 2025)