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Real-Time Displacement Measurements With a Fabry-Perot Cavity and a Diode Laser
Published
Author(s)
Lowell P. Howard, Jack A. Stone Jr.
Abstract
We present the basic operating principles of a traceable measurement system for use with scanned probe microscopes and nanometer-resolution displacement sensors. Our method is based upon a tunable external-cavity diode laser system which is Pound-Drever-Hall locked to a Fabry-Perot interferometer cavity with mechanical considerations taken for its use as a displacement metrology system. We discuss methods for making real-time measurements of the wide-bandwidth optical heterodyne signals our interferometer system produces. We report initial results using the system to examine known optical mixing errors in a heterodyne Michelson interferometer.
Citation
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Volume
25
Issue
4
Pub Type
Journals
Keywords
diode laser, Fabry-Perot interferometer, microwave frequency counter, nanometrology, optical heterodyne frequency measurement, optical mixing errors
Howard, L.
and Stone, J.
(2000),
Real-Time Displacement Measurements With a Fabry-Perot Cavity and a Diode Laser, Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
(Accessed October 27, 2025)