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Real-Time Displacement Measurements With a Fabry-Perot Cavity and a Diode Laser

Published

Author(s)

Lowell P. Howard, Jack A. Stone Jr.

Abstract

We present the basic operating principles of a traceable measurement system for use with scanned probe microscopes and nanometer-resolution displacement sensors. Our method is based upon a tunable external-cavity diode laser system which is Pound-Drever-Hall locked to a Fabry-Perot interferometer cavity with mechanical considerations taken for its use as a displacement metrology system. We discuss methods for making real-time measurements of the wide-bandwidth optical heterodyne signals our interferometer system produces. We report initial results using the system to examine known optical mixing errors in a heterodyne Michelson interferometer.
Citation
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Volume
25
Issue
4

Keywords

diode laser, Fabry-Perot interferometer, microwave frequency counter, nanometrology, optical heterodyne frequency measurement, optical mixing errors

Citation

Howard, L. and Stone, J. (2000), Real-Time Displacement Measurements With a Fabry-Perot Cavity and a Diode Laser, Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology (Accessed April 25, 2024)
Created January 1, 2000, Updated February 19, 2017