Textured laps can be created by slumping uniform thin films of appropriate materials over textured substrates that have been generated to the required figure. The film can easily be replaced and the lap shape is invariant since the lap substrate never contacts the workpiece nor the polishing compound. Thus extremely repeatable lapping and polishing processes are obtained. This paper introduces this approach to lap construction and presents preliminary results.
Proceedings of SPIE
July 11, 1995
San Diego, CA, USA
Optical Manufacturing and Testing, Victor J. Doherty, H. Philip Stahl, Editors September 1995