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Radio-Frequency Glow Discharge Spectrometry A Critical Review



Michael R. Winchester, R Payling


This paper presents a critical review of analytical radio frequency glow discharge spectrometry (rf-GDS). The historical foundations of rf-GDS are described, and current knowledge of the fundamental physics of analytical rf glow discharges is discussed. Additionally, instrumentation, methodologies, and applications of rf glow discharge optical emission spectrometry (rf-GDOES) and mass spectrometry (rf-GDMS) are reviewed. Although other rf-GDS techniques have appeared [e.g., rf glow discharge atomic absorption spectrophotometry (rf-GDAAS)], the emphasis is placed upon rf-GDOES and rf GDMS, because they have received by far the most interest from analytical chemical metrologists. This review also provides explanations of some developments that are needed for further progress in the field of analytical rf-GDS.
Spectrochimica Acta Part A-Molecular and Biomolecular Spectroscopy


Bulk analysis, depth profiling, glow discharge mass spectrometry, optical emission spectroscopy, plasma, radio frequency, speciation


Winchester, M. and Payling, R. (2004), Radio-Frequency Glow Discharge Spectrometry A Critical Review, Spectrochimica Acta Part A-Molecular and Biomolecular Spectroscopy, [online], (Accessed April 15, 2024)
Created April 1, 2004, Updated March 28, 2017