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Radio-Frequency and DC Electrical Characterization on a Modular MEMS Mechanical Test Platform for Nanomaterials

Published

Author(s)

J. J. Brown, Thomas Mitchell (Mitch) Wallis, Pavel Kabos, Kristine A. Bertness, Norman Sanford, Victor Bright

Abstract

In order to enable radio frequency (RF) data collection from a micromechanical system designed to strain nanomaterials, a coplanar electrical waveguide has been integrated with an actuated microscale stage. RF (100 MHz to 20 GHz) admittance measurements obtained from this device demonstrate that the capacitance of an empty test stage decreases from 0.87 fF to 0.78 fF as the stage gap increases. Direct current (DC) photoconduction measurements demonstrate successful electrical interfacing to a suspended GaN nanowire (NW) that was placed on the stage by dielectrophoretic self-assembly.
Proceedings Title
Digest of the Transducers 2013 Conference
Conference Dates
June 16-20, 2013
Conference Location
Barcelona, ES

Keywords

MEMS testers, coplanar waveguide, test platform, radio-frequency

Citation

Brown, J. , Wallis, T. , Kabos, P. , Bertness, K. , Sanford, N. and Bright, V. (2013), Radio-Frequency and DC Electrical Characterization on a Modular MEMS Mechanical Test Platform for Nanomaterials, Digest of the Transducers 2013 Conference, Barcelona, ES (Accessed February 21, 2024)
Created June 15, 2013, Updated October 12, 2021