U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy

Published

Author(s)

Donna C. Hurley, Malgorzata Kopycinska-Mueller, Tony B. Kos, Roy H. Geiss

Abstract

We are developing metrology for rapid, quantitative assessment of elastic porperties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable modulus measurements at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.
Citation
Advanced Engineering Materials
Volume
8
Pub Type
Journals

Download Paper

Local Download

Keywords

atomic force acoustic microscopy, atomic force microscopy, elastic properties, nanomechanics
Nanotechnology

Citation

Hurley, D. , Kopycinska-Mueller, M. , Kos, T. and Geiss, R. (2005), Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy, Advanced Engineering Materials, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50097 (Accessed December 12, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created August 30, 2005, Updated October 12, 2021