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Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy

Published

Author(s)

Donna C. Hurley, Malgorzata Kopycinska-Mueller, Tony B. Kos, Roy H. Geiss

Abstract

We are developing metrology for rapid, quantitative assessment of elastic porperties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable modulus measurements at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.
Citation
Advanced Engineering Materials
Volume
8

Keywords

atomic force acoustic microscopy, atomic force microscopy, elastic properties, nanomechanics

Citation

Hurley, D. , Kopycinska-Mueller, M. , Kos, T. and Geiss, R. (2005), Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy, Advanced Engineering Materials, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50097 (Accessed May 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created August 30, 2005, Updated October 12, 2021