Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy
Donna C. Hurley, Malgorzata Kopycinska-Mueller, Tony B. Kos, Roy H. Geiss
We are developing metrology for rapid, quantitative assessment of elastic porperties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable modulus measurements at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.
, Kopycinska-Mueller, M.
, Kos, T.
and Geiss, R.
Quantitative Elastic-Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy, Advanced Engineering Materials, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50097
(Accessed September 28, 2023)