Tanuma, S.
, Powell, C.
and Penn, D.
(1987),
Proposed Formula for Electron Inelastic Mean Free Paths Based on Calculations for 31 Materials, Surface Science, [online], https://doi.org/10.1016/s0039-6028(87)81156-1, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620306 (Accessed April 30, 2026)
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Proposed Formula for Electron Inelastic Mean Free Paths Based on Calculations for 31 Materials
Published
Author(s)
Shigeo Tanuma, ,
Abstract
A new general formula is proposed for determining electron inelastic mean free paths (IMFP's) for 200-2000 eV electrons in solids. The new formula is based on separate IMFP calculations of 27 elements and 4 compounds using an algorithm due to Penn. This formula is believed useful for determining the IMFP dependence on electron energy for a given material and the material-dependence for a given energy. The new formula should also be a reasonable guide to electron attenuation lengths which have been difficult to determine with the needed accuracy.Citation
Surface Science
Volume
192
Pub Type
Journals
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Created December 1, 1987, Updated April 25, 2026