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Proposed Formula for Electron Inelastic Mean Free Paths Based on Calculations for 31 Materials

Published

Author(s)

Shigeo Tanuma, Cedric J. Powell, David R. Penn

Abstract

A new general formula is proposed for determining electron inelastic mean free paths (IMFP's) for 200-2000 eV electrons in solids. The new formula is based on separate IMFP calculations of 27 elements and 4 compounds using an algorithm due to Penn. This formula is believed useful for determining the IMFP dependence on electron energy for a given material and the material-dependence for a given energy. The new formula should also be a reasonable guide to electron attenuation lengths which have been difficult to determine with the needed accuracy.
Citation
Surface Science
Volume
192

Citation

Tanuma, S. , Powell, C. and Penn, D. (1987), Proposed Formula for Electron Inelastic Mean Free Paths Based on Calculations for 31 Materials, Surface Science (Accessed April 20, 2024)
Created November 30, 1987, Updated October 12, 2021