Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Progress Toward MMIC On-Wafer Standards



Dylan F. Williams, Roger Marks, K. R. Phillips, T. Miers


A prototype standard set in coplanar waveguide suitable for the calibration of wafer probe stations has been developed through a cooperative effort between the National Institute of Standards and Technology and a MIMIC Phase 3 team. The coplanar standard set is intended primarily for in-process testing, although the characterization of coplanar waveguide circuits is also possible. In this paper two sources of systematic errors associated with the prototype standard set, the propagation of undesirable modes, and the influence of adjacent structures on the electrical connection to the elements of the standard set, will be discussed.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Conference Dates
November 29-30, 1990
Conference Location
Monterey, CA


Williams, D. , Marks, R. , Phillips, K. and Miers, T. (1990), Progress Toward MMIC On-Wafer Standards, Tech Dig., Auto. RF Tech. Group Conf., Monterey, CA, [online], (Accessed May 21, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created November 1, 1990, Updated November 10, 2018