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Progress Toward MMIC On-Wafer Standards

Published

Author(s)

Dylan F. Williams, Roger Marks, K. R. Phillips, T. Miers

Abstract

A prototype standard set in coplanar waveguide suitable for the calibration of wafer probe stations has been developed through a cooperative effort between the National Institute of Standards and Technology and a MIMIC Phase 3 team. The coplanar standard set is intended primarily for in-process testing, although the characterization of coplanar waveguide circuits is also possible. In this paper two sources of systematic errors associated with the prototype standard set, the propagation of undesirable modes, and the influence of adjacent structures on the electrical connection to the elements of the standard set, will be discussed.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Volume
18
Conference Dates
November 29-30, 1990
Conference Location
Monterey, CA

Citation

Williams, D. , Marks, R. , Phillips, K. and Miers, T. (1990), Progress Toward MMIC On-Wafer Standards, Tech Dig., Auto. RF Tech. Group Conf., Monterey, CA, [online], https://doi.org/10.1109/ARFTG.1990.323998 (Accessed May 21, 2024)

Issues

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Created November 1, 1990, Updated November 10, 2018