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A Programmable Transmission Electron Detector for Nanomaterials Characterization in a Scanning Electron Microscope

Published

Author(s)

Jason D. Holm, Benjamin W. Caplins, Robert R. Keller

Abstract

A new programmable detector for scanning transmission electron microscopy (pSTEM) is described. A digital micromirror array lies at the heart of the detector and serves as a programmable virtual objective aperture. Two sensors, a photomultiplier tube and a CMOS digital camera are used to enable real-space transmission imaging and on-axis diffraction, respectively. Detector operation is demonstrated with several samples in a conventional scanning electron microscope (SEM).
Citation
TechConnect World Technical Proceedings
Volume
TechConnect Briefs 2019

Keywords

scanning, transmission, electron microscopy, diffraction, programmable
Created June 17, 2019, Updated August 28, 2019