A Programmable Transmission Electron Detector for Nanomaterials Characterization in a Scanning Electron Microscope
Jason D. Holm, Benjamin W. Caplins, Robert R. Keller
A new programmable detector for scanning transmission electron microscopy (pSTEM) is described. A digital micromirror array lies at the heart of the detector and serves as a programmable virtual objective aperture. Two sensors, a photomultiplier tube and a CMOS digital camera are used to enable real-space transmission imaging and on-axis diffraction, respectively. Detector operation is demonstrated with several samples in a conventional scanning electron microscope (SEM).