A programmable dark-field detector for imaging two-dimensional materials in the scanning electron microscope

Published: February 07, 2019


Benjamin W. Caplins, Jason D. Holm, Robert R. Keller


Unit cell orientation information is encoded in electron diffraction patterns of crystalline materials. Traditional transmission electron detectors implemented in the scanning electron microscope are highly symmetric and are insensitive to in-plane unit cell orientation information. Herein we detail the implementation of a transmission electron detector that utilizes a digital micromirror array to select anisotropic portions of a diffraction pattern for imaging purposes. We demonstrate that this detector can be used to map the in-plane orientation of grains in two-dimensional materials. The described detector has the potential to replace and/or supplement conventional transmission electron detectors.
Proceedings Title: Proceedings of SPIE Photonics West 2019
Conference Dates: February 2-7, 2019
Conference Location: San Francisco, CA
Conference Title: SPIE Photonics West 2019
Pub Type: Conferences

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digital micromirror device (DMD), scanning electron microscope (SEM), scanning transmission electron microscopy (STEM), transmission electron detector
Created February 07, 2019, Updated April 11, 2019