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A programmable dark-field detector for imaging two-dimensional materials in the scanning electron microscope

Published

Author(s)

Benjamin W. Caplins, Jason D. Holm, Robert R. Keller

Abstract

Unit cell orientation information is encoded in electron diffraction patterns of crystalline materials. Traditional transmission electron detectors implemented in the scanning electron microscope are highly symmetric and are insensitive to in-plane unit cell orientation information. Herein we detail the implementation of a transmission electron detector that utilizes a digital micromirror array to select anisotropic portions of a diffraction pattern for imaging purposes. We demonstrate that this detector can be used to map the in-plane orientation of grains in two-dimensional materials. The described detector has the potential to replace and/or supplement conventional transmission electron detectors.
Proceedings Title
Proceedings of SPIE Photonics West 2019
Conference Dates
February 2-7, 2019
Conference Location
San Francisco, CA
Conference Title
SPIE Photonics West 2019

Keywords

digital micromirror device (DMD), scanning electron microscope (SEM), scanning transmission electron microscopy (STEM), transmission electron detector

Citation

Caplins, B. , Holm, J. and Keller, R. (2019), A programmable dark-field detector for imaging two-dimensional materials in the scanning electron microscope, Proceedings of SPIE Photonics West 2019, San Francisco, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927331 (Accessed April 11, 2021)
Created February 7, 2019, Updated April 11, 2019