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Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density:

Published

Author(s)

T J Russell
Citation
- NBS IR 81-2413
Report Number
NBS IR 81-2413

Citation

Russell, T. (1982), Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.81-2413 (Accessed May 28, 2024)

Issues

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Created January 1, 1982, Updated May 19, 2023