Powell, C.
and Newbury, D.
(2005),
Preface for Special Issue of Surface and Interface Analysis with the Proceedings of the NIST Workshop on 'Modeling Electron Transport for Applications in Electron and X-ray Analysis and Metrology', Surface and Interface Analysis
(Accessed April 26, 2024)
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Preface for Special Issue of Surface and Interface Analysis with the Proceedings of the NIST Workshop on 'Modeling Electron Transport for Applications in Electron and X-ray Analysis and Metrology'
Published
Author(s)
,
Abstract
An introduction is given for the Proceedings of the Workshop on Modeling Electron Transport for Applications in Electron and X-ray Analysis and Metrology that was held at NIST on November 8-10, 2004.Citation
Surface and Interface Analysis
Volume
37
Issue
No. 11
Pub Type
Journals
Keywords
electron transport, electron-interaction data, metrology, modeling, scanning electron microscopy, simulation surface analysis, x-ray microanalysis
Citation
Created November 1, 2005, Updated February 17, 2017