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Preface for Special Issue of Surface and Interface Analysis with the Proceedings of the NIST Workshop on 'Modeling Electron Transport for Applications in Electron and X-ray Analysis and Metrology'

Published

Author(s)

Cedric J. Powell, Dale E. Newbury

Abstract

An introduction is given for the Proceedings of the Workshop on Modeling Electron Transport for Applications in Electron and X-ray Analysis and Metrology that was held at NIST on November 8-10, 2004.
Citation
Surface and Interface Analysis
Volume
37
Issue
No. 11

Keywords

electron transport, electron-interaction data, metrology, modeling, scanning electron microscopy, simulation surface analysis, x-ray microanalysis

Citation

Powell, C. and Newbury, D. (2005), Preface for Special Issue of Surface and Interface Analysis with the Proceedings of the NIST Workshop on 'Modeling Electron Transport for Applications in Electron and X-ray Analysis and Metrology', Surface and Interface Analysis (Accessed April 14, 2024)
Created November 1, 2005, Updated February 17, 2017