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PUBLICATIONS

Precise AFM Cantilever Spring Constant Calibration Using a Reference Cantilever Array

Published

Author(s)

Richard S. Gates, M G. Reitsma

Abstract

A new method of calibrating the stiffness of atomic force microscope (AFM) cantilevers is demonstrated using a unique array of uniform microfabricated reference cantilevers. A series of force-distance curves were obtained using a commercial AFM test cantilever on the reference cantilever array and the data analyzed using an implied Euler-Bernoulli model to extract the spring constant from a linear regression fit of the data. This method offers a factor of three improvement in the precision of the reference cantilever calibration method and when combined with the SI traceability potential of the cantilever array can provide very accurate spring constant calibrations.
Citation
Review of Scientific Instruments
Volume
78
Pub Type
Journals

Download Paper

Local Download

Keywords

AFM, array, calibration, cantilever, spring constant
Nanometrology

Citation

Gates, R. and Reitsma, M. (2007), Precise AFM Cantilever Spring Constant Calibration Using a Reference Cantilever Array, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854219 (Accessed October 8, 2025)

Issues

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Created September 1, 2007, Updated February 19, 2017
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