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Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers

Published

Author(s)

Kenneth G. Kreider, F DiMeo
Citation
Sensors and Actuators A-Physical
Volume
69

Citation

Kreider, K. and DiMeo, F. (1998), Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers, Sensors and Actuators A-Physical (Accessed June 16, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created February 12, 1998, Updated February 19, 2017