Kreider, K.
and DiMeo, F.
(1998),
Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers, Sensors and Actuators A-Physical
(Accessed October 13, 2024)
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Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers
Published
Author(s)
, F DiMeo
Citation
Sensors and Actuators A-Physical
Volume
69
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created February 12, 1998, Updated February 19, 2017