Doyle, J.
, Doughty, D.
and Gallagher, A.
(1992),
Plasma chemistry in silane/germane and disilane/germane mixtures, Journal of Applied Physics
(Accessed June 10, 2023)
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Plasma chemistry in silane/germane and disilane/germane mixtures
Published
Author(s)
J R. Doyle, D A. Doughty, A Gallagher
Citation
Journal of Applied Physics
Volume
71
Pub Type
Journals
Citation
Created January 1, 1992, Updated February 17, 2017