Doyle, J.
, Doughty, D.
and Gallagher, A.
(1992),
Plasma chemistry in silane/germane and disilane/germane mixtures, Journal of Applied Physics
(Accessed April 24, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Plasma chemistry in silane/germane and disilane/germane mixtures
Published
Author(s)
J R. Doyle, D A. Doughty, A Gallagher
Citation
Journal of Applied Physics
Volume
71
Pub Type
Journals
Citation
Created January 1, 1992, Updated February 17, 2017