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Plasma chemistry in silane/germane and disilane/germane mixtures

Published

Author(s)

J R. Doyle, D A. Doughty, A Gallagher
Citation
Journal of Applied Physics
Volume
71

Citation

Doyle, J. , Doughty, D. and Gallagher, A. (1992), Plasma chemistry in silane/germane and disilane/germane mixtures, Journal of Applied Physics (Accessed April 18, 2024)
Created January 1, 1992, Updated February 17, 2017