Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Planar Resistors for Probe Station Calibration



Dave K. Walker, Dylan F. Williams, Nicole Morgan


This paper investigates the effects of variations in sheet resistance, geometry, distance from the probe tip, and fabrication processes on the impedance of planar nickel-chromium resistors. Resistor reactance is a strong function of film resistance, but depends only weakly on geometry and distance from the probe tip. Photoresist contamination in the resistive film induces more complicated impedance behavior, even at low frequencies. The impact on circuit design and time- and frequency-domain calibrations is considered in light of these results.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Conference Dates
December 3-4, 1992
Conference Location
Orlando, FL


Walker, D. , Williams, D. and Morgan, N. (1992), Planar Resistors for Probe Station Calibration, Tech Dig., Auto. RF Tech. Group Conf., Orlando, FL, [online], (Accessed April 19, 2024)
Created December 1, 1992, Updated November 10, 2018