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PUBLICATIONS

Planar Resistors for Probe Station Calibration

Published

Author(s)

Dave K. Walker, Dylan F. Williams, Nicole Morgan

Abstract

This paper investigates the effects of variations in sheet resistance, geometry, distance from the probe tip, and fabrication processes on the impedance of planar nickel-chromium resistors. Resistor reactance is a strong function of film resistance, but depends only weakly on geometry and distance from the probe tip. Photoresist contamination in the resistive film induces more complicated impedance behavior, even at low frequencies. The impact on circuit design and time- and frequency-domain calibrations is considered in light of these results.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Volume
22
Conference Dates
December 3-4, 1992
Conference Location
Orlando, FL
Pub Type
Conferences

Download Paper

https://doi.org/10.1109/ARFTG.1992.326993
Electromagnetics

Citation

Walker, D. , Williams, D. and Morgan, N. (1992), Planar Resistors for Probe Station Calibration, Tech Dig., Auto. RF Tech. Group Conf., Orlando, FL, [online], https://doi.org/10.1109/ARFTG.1992.326993 (Accessed October 8, 2025)

Issues

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Created December 1, 1992, Updated November 10, 2018
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