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Pixel-based absolute topography test for three flats

Published

Author(s)

R E. Parks, Christopher J. Evans, Lianzhen Shao
Citation
Applied Optics
Volume
37(25)

Keywords

flatness, measurement of flatness

Citation

Parks, R. , Evans, C. and Shao, L. (1998), Pixel-based absolute topography test for three flats, Applied Optics (Accessed June 10, 2023)
Created December 31, 1997, Updated October 12, 2021