Performance of BAW Resonators at Cryogenic Temperatures
Eduard Rocas, C. Collado, Jordi Mateu, A Hueltes, J. Verdu, Robert Aigner, James Booth
In this work we go beyond the usual temperature range for commercial applications and explore the functioning of Bulk Acoustic Wave (BAW) resonators down to cryogenic temperatures, to get the whole picture at understanding the physical tendency of the main parameters with temperature. This can ensure the proper functioning for specific applications where the device is exposed to extreme temperature variations.
, Collado, C.
, Mateu, J.
, Hueltes, A.
, Verdu, J.
, Aigner, R.
and Booth, J.
Performance of BAW Resonators at Cryogenic Temperatures, IEEE Xplore Digital Library
(Accessed June 2, 2023)