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Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy

Published

Author(s)

B Dragnea, Jan Preusser, J M. Szarko, S R. Leone, W D. Hinsberg
Citation
Journal of Vacuum Science and Technology B
Volume
19

Citation

Dragnea, B. , Preusser, J. , Szarko, J. , Leone, S. and Hinsberg, W. (2001), Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy, Journal of Vacuum Science and Technology B (Accessed December 7, 2023)
Created December 31, 2000, Updated October 12, 2021