Dragnea, B.
, Preusser, J.
, Szarko, J.
, Leone, S.
and Hinsberg, W.
(2001),
Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy, Journal of Vacuum Science and Technology B
(Accessed July 27, 2024)
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Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy
Published
Author(s)
B Dragnea, , J M. Szarko, , W D. Hinsberg
Citation
Journal of Vacuum Science and Technology B
Volume
19
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 2000, Updated October 12, 2021