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Particle Size Metrology: Comparison Between Aerosol Electrical Mobility and Laser Surface Light Scattering Techniques

Published

Author(s)

Thomas A. Germer, George W. Mulholland

Abstract

Two different methods used to determine the size of polystyrene spheres were found to disagree by about 5 %. One of the methods, differential mobility analysis, measures particles in the aerosol phase, while the other, laser surface light scattering, measures them bound to a surface. It is believed that the observed discrepancy results from deformation of the particle when it bound the surface. The implications of such a deformation on scanning surface inspection system calibration is discussed.
Proceedings Title
2005
Conference Dates
March 15-18, 2005
Conference Title
International Conference on Characterization and Metrology for ULSI Technology

Keywords

deformation, dimensional metrology, inspection, particles, scattering

Citation

Germer, T. and Mulholland, G. (2005), Particle Size Metrology: Comparison Between Aerosol Electrical Mobility and Laser Surface Light Scattering Techniques, 2005, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841882 (Accessed March 3, 2024)
Created May 2, 2005, Updated February 17, 2017