Germer, T.
and Mulholland, G.
(2005),
Particle Size Metrology: Comparison Between Aerosol Electrical Mobility and Laser Surface Light Scattering Techniques, 2005, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841882
(Accessed December 7, 2024)
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Particle Size Metrology: Comparison Between Aerosol Electrical Mobility and Laser Surface Light Scattering Techniques
Published
Author(s)
,
Abstract
Two different methods used to determine the size of polystyrene spheres were found to disagree by about 5 %. One of the methods, differential mobility analysis, measures particles in the aerosol phase, while the other, laser surface light scattering, measures them bound to a surface. It is believed that the observed discrepancy results from deformation of the particle when it bound the surface. The implications of such a deformation on scanning surface inspection system calibration is discussed.Proceedings Title
2005
Conference Dates
March 15-18, 2005
Conference Title
International Conference on Characterization and Metrology for ULSI Technology
Pub Type
Conferences
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Keywords
deformation, dimensional metrology, inspection, particles, scattering
Citation
Issues
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Created May 2, 2005, Updated February 17, 2017