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Particle accumulation in a flowing silane RF discharge

Published

Author(s)

Branislav M. Jelenkovic, A Gallagher
Citation
Journal of Applied Physics
Volume
82

Citation

Jelenkovic, B. and Gallagher, A. (1997), Particle accumulation in a flowing silane RF discharge, Journal of Applied Physics (Accessed November 13, 2024)

Issues

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Created January 1, 1997, Updated February 17, 2017