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An Overview of Nano-Micro-Meso Scale Manufacturing at the National Institute of Standards and Technology (NIST)



E Amatucci, Nicholas Dagalakis, Bradley N. Damazo, Matthew A. Davies, John Evans, Jun-Feng Song


The future of Nano, Micro and Meso Scale manufacturing operations will be strongly influenced by a new breed of assembly and manufacturing tools that will be intelligent, flexible, more precise, include in-process production technologies and make use of advanced part design, assembly and process data. To prioritized NIST efforts in Nano, Micro and Meso manufacturing, several visits to industrial and government research laboratories and two workshops were organized. The identified needs at the Meso and Micro Scale include: Dimensional and Mechanical Metrology, Assembly and Packaging Technology and Standards, and Providing a Science Base for Materials and Processes emphasizing materials testing methods and properties data. Nanocharacterization, Nanomanipulation, Nanodevices and Magnetics Industry Support have been identified at the Nano Scale. Nanometrology and Nanomanipulation have a substantial base from which to expand within the Manufacturing Engineering Laboratory (MEL). Therefore, MEL is initiating a new long-term Strategic Program in Nano-Manufacturing to conduct research and development, to provide the measurements and standards needed by industry to measure, manipulate and manufacture nanoscale discrete part products. The program will address the measurement and standards issues associated with the manufacture of both nano scale products themselves, as well as with the development of the production systems required for their manufacture.
Proceedings Title
Proceedings of the Nano Tribology Workshop
Conference Dates
March 13-15, 2000
Conference Location
Gaithersburg, MD, USA
Conference Title
Nano Tribology Workshop


Meso-manufacturing, Metrology, Standards, Control, nanomanipulation, nanocharacterization, nanodevices, nano-manufacturing


Amatucci, E. , Dagalakis, N. , Damazo, B. , Davies, M. , Evans, J. and Song, J. (2000), An Overview of Nano-Micro-Meso Scale Manufacturing at the National Institute of Standards and Technology (NIST), Proceedings of the Nano Tribology Workshop, Gaithersburg, MD, USA, [online], (Accessed June 24, 2024)


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Created February 29, 2000, Updated October 12, 2021