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Overview on CMOS MEMS Fabrication Techniques and Applications

Published

Author(s)

Michael Gaitan
Proceedings Title
Proc., IMAPS
Conference Dates
October 9-11, 2001
Conference Location
Baltimore, MD
Conference Title
2001 IMAPS

Keywords

CMOS, MEMS

Citation

Gaitan, M. (2001), Overview on CMOS MEMS Fabrication Techniques and Applications, Proc., IMAPS, Baltimore, MD (Accessed February 21, 2024)
Created November 1, 2001, Updated February 17, 2017