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Optomechanical Uncooled Infrared Imaging System: Design, Microfabrication and Performance,

Published

Author(s)

Y Zhao, M Mao, R Horowitz, J Varesi, P R. Norton, John Kitching
Citation
Journal of Microelectromechanical Systems
Volume
11

Citation

Zhao, Y. , Mao, M. , Horowitz, R. , Varesi, J. , Norton, P. and Kitching, J. (2002), Optomechanical Uncooled Infrared Imaging System: Design, Microfabrication and Performance,, Journal of Microelectromechanical Systems (Accessed December 4, 2024)

Issues

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Created December 31, 2001, Updated October 12, 2021