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Optimization of the Electrical Properties of Low-Dose SIMOX Wafers

Published

Author(s)

P. J. McMarr, B. J. Mrstik, M. E. Twigg, H. L. Hughes, M. J. Anc, Peter Roitman, G. A. Garcia
Proceedings Title
Proc., 1997 Government Microcircuit Applications Conference (GOMAC)
Conference Dates
March 10-13, 1997
Conference Location
Las Vegas, NV, USA

Citation

McMarr, P. , Mrstik, B. , Twigg, M. , Hughes, H. , Anc, M. , Roitman, P. and Garcia, G. (1997), Optimization of the Electrical Properties of Low-Dose SIMOX Wafers, Proc., 1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA (Accessed April 19, 2024)
Created December 30, 1997, Updated October 12, 2021