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Optical Materials and Detector Characterization for VUV Lithography

Published

Author(s)

R Gupta, John H. Burnett, V Liberman
Citation
Future Fab International 9<sup>pth</sup> Edition
Publisher Info
Technology Publishing , London,

Citation

Gupta, R. , Burnett, J. and Liberman, V. (2000), Optical Materials and Detector Characterization for VUV Lithography, Technology Publishing , London, (Accessed May 22, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2000, Updated February 17, 2017