Benck, E.
and Roberts, J.
(1998),
Optical computer aided tomography for plasma uniformity measurements, http://www.vacuum.org/NCCAVS/JUL98_4.PDF, [online], http://www.vacuum.org/NCCAVS/JUL98_4.PDF (Accessed May 10, 2026)
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Optical computer aided tomography for plasma uniformity measurements
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Created January 1, 1998, Updated February 17, 2017