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Optical Coherence Tomography for Dimensional Metrology of Lab-on-a-chip devices

Published

Author(s)

Darwin R. Reyes-Hernandez, Michael W. Halter, Jeeseong Hwang

Abstract

Here we present a new metrology tool for the determination of the dimensions of channels from final product Lab-on-a-chip devices. Using Optical Coherence Tomography (OCT) areas of up to 12 mm x 12 mm can be imaged in less than 1 second, without the need of introducing fluorescent molecules in the channels, and the images analysed with in-house written ImageJ macros. The results obtained with OCT for the height and width of channels overlapped with results obtained with confocal fluorescence microscopy, use in this study as the reference measurement.
Proceedings Title
Proceedings of Micro Total Analysis Systems 2013
Conference Dates
October 27-31, 2013
Conference Location
Freiburg
Conference Title
The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences
(MicroTAS 2013)

Keywords

Dimensional Metrology, Optical Coherence Tomography (OCT), PMMA, Confocal Fluorescence Microscopy

Citation

Reyes-Hernandez, D. , Halter, M. and Hwang, J. (2013), Optical Coherence Tomography for Dimensional Metrology of Lab-on-a-chip devices, Proceedings of Micro Total Analysis Systems 2013, Freiburg, -1 (Accessed May 28, 2024)

Issues

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Created October 27, 2013, Updated February 19, 2017