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Non-Destructive Submicron Dimensional Metrology Using the Scanning Electron Microscope

Published

Author(s)

Michael T. Postek
Citation
Review of Progress in NDE 6B
Publisher Info
Plenum Publ. Corp.,

Citation

Postek, M. (1987), Non-Destructive Submicron Dimensional Metrology Using the Scanning Electron Microscope, Plenum Publ. Corp., (Accessed October 2, 2023)
Created December 31, 1987, Updated February 17, 2017