Davies, A.
, Evans, C.
, Kestner, R.
and Bremer, M.
(2000),
The NIST X-Ray Optics Calibration Interferometer (XCALIBIR), Optical Fabrication and Testing, Conference | | | Optical Society of America, Quebec City, CA
(Accessed May 30, 2023)
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The NIST X-Ray Optics Calibration Interferometer (XCALIBIR)
Published
Author(s)
, , R Kestner, M Bremer
Abstract
NIST's next generation interferometer (XCALIBIR) is a 300mm aperture, general-purpose interferometer designed to push the limits of optical testing. In this presentation we describe the design goals and performance results of the instrument to date.Proceedings Title
Optical Fabrication and Testing, Conference | | | Optical Society of America
Volume
42
Conference Dates
June 18-22, 2000
Conference Location
Quebec City, CA
Conference Title
Trends in Optics and Photonics
Pub Type
Conferences
Keywords
instrumentation, interferometer, measurement, metrology, optical testing, optics
Citation
Created June 1, 2000, Updated February 19, 2017