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PUBLICATIONS

The NIST X-Ray Optics Calibration Interferometer (XCALIBIR)

Published

Author(s)

Angela Davies, Christopher J. Evans, R Kestner, M Bremer

Abstract

NIST's next generation interferometer (XCALIBIR) is a 300mm aperture, general-purpose interferometer designed to push the limits of optical testing. In this presentation we describe the design goals and performance results of the instrument to date.
Proceedings Title
Optical Fabrication and Testing, Conference | | | Optical Society of America
Volume
42
Conference Dates
June 18-22, 2000
Conference Location
Quebec City, CA
Conference Title
Trends in Optics and Photonics
Pub Type
Conferences

Keywords

instrumentation, interferometer, measurement, metrology, optical testing, optics
Dimensional metrology

Citation

Davies, A. , Evans, C. , Kestner, R. and Bremer, M. (2000), The NIST X-Ray Optics Calibration Interferometer (XCALIBIR), Optical Fabrication and Testing, Conference | | | Optical Society of America, Quebec City, CA (Accessed October 10, 2025)

Issues

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Created June 1, 2000, Updated February 19, 2017
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