Lee, H.
, Wu, W.
and Soles, C.
(2004),
NIST recommended practice guide:pre characterization in low-k dielectric films using x-ray reflectivitiy, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.960-13
(Accessed May 3, 2024)
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NIST recommended practice guide:pre characterization in low-k dielectric films using x-ray reflectivitiy
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Citation
- NBS SP 960-13
Report Number
NBS SP 960-13
Pub Type
NIST Pubs
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Created January 1, 2004, Updated May 19, 2023