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NIST recommended practice guide:pre characterization in low-k dielectric films using x-ray reflectivitiy

Published

Author(s)

Hae-Jeong Lee, Wen-li Wu, Christopher L Soles
Citation
- NBS SP 960-13
Report Number
NBS SP 960-13

Citation

Lee, H. , Wu, W. and Soles, C. (2004), NIST recommended practice guide:pre characterization in low-k dielectric films using x-ray reflectivitiy, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.960-13 (Accessed May 23, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2004, Updated May 19, 2023