Nyyssonen, D.
(1988),
A New Approach to Image Modeling and Edge Detection in the SEM, Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control II, Santa Clara, CA, USA
(Accessed October 15, 2024)
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A New Approach to Image Modeling and Edge Detection in the SEM
Published
Author(s)
D. Nyyssonen
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control II
Volume
921
Conference Location
Santa Clara, CA, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1988, Updated October 12, 2021