Nyyssonen, D.
(1988),
A New Approach to Image Modeling and Edge Detection in the SEM, Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control II, Santa Clara, CA, USA
(Accessed July 27, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
A New Approach to Image Modeling and Edge Detection in the SEM
Published
Author(s)
D. Nyyssonen
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control II
Volume
921
Conference Location
Santa Clara, CA, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1988, Updated October 12, 2021