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A New Approach to Image Modeling and Edge Detection in the SEM

Published

Author(s)

D. Nyyssonen
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control II
Volume
921
Conference Location
Santa Clara, CA, USA

Citation

Nyyssonen, D. (1988), A New Approach to Image Modeling and Edge Detection in the SEM, Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control II, Santa Clara, CA, USA (Accessed June 23, 2024)

Issues

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Created December 30, 1988, Updated October 12, 2021