Near-Field Antenna as a Scanning Microwave Probe for Characterization of Materials and Devices

Published

April 12, 2010

Author(s)

Atif A. Imtiaz, Thomas M. Wallis, SangHyun S. Lim, Jonathan Chisum, Zoya Popovic, Pavel Kabos

Abstract

The Scanning Microwave Probe (SMP) is emerging as an important broadband metrology tool for characterizing the materials and devices in the micron and sub-micron length scales in the frequency range of 10 MHz to 110 GHz. In this document we establish three important characteristics ofSMP: 1) the sensitivity of this tool to the materials property by showing data in the conductivity range of 0 to 2000 S/cm in a stratified medium )2 the breaking of the λ/2 barrier for spatial-resolution where we report measurement of 1υm spatially resolved features at the frequency of 4.6 GHz on SiGe sample and 3) detection of subsurface structures under 2 metal layers in an 8-layer CMOS IC with a measured 0.3% change in Q-factor at 1.8 GHz.

Proceedings Title

EuCAP 2010: The 4th European Conference on Antennas and Propagation, Barcelona, Spain

Conference Dates

April 12-16, 2010

Conference Location

Barcelona

Pub Type

Conferences

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Keywords

Near-field antenna, microwaves, scanning microwave probe, metrology

Citation

Imtiaz, A. , Wallis, T. , Lim, S. , Chisum, J. , Popovic, Z. and Kabos, P. (2010), Near-Field Antenna as a Scanning Microwave Probe for Characterization of Materials and Devices, EuCAP 2010: The 4th European Conference on Antennas and Propagation, Barcelona, Spain, Barcelona, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905030 (Accessed October 11, 2025)