Nanoscale tuning fork cavity optomechanical transducers with design-enabled frequency tuning and temperature compensation

Published

June 7, 2018

Author(s)

Rui Zhang, Robert Ilic, Yuxiang Liu, Vladimir Aksyuk

Abstract

In this work, we design, fabricate and characterize monolithic, nanoscale Si3N4 tuning fork cavity optomechanical transducers with design enabled tuning of mechanical resonant frequencies and passive temperature compensation. Both frequency tuning and temperature compensation are achieved by the design of a nonlinear mechanical clamp. The compensation reduces the temperature sensitivity of frequency by 18 times, achieving fractional frequency sensitivity of (3.2 ± 0.4) 10^-6 1/°C. The design simultaneously increases the stress in the tuning fork by more than a factor of two relative to the residual stress, and makes the resulting high resonator frequency insensitive to the residual stress and temperature variations. These stable resonators may find uses for stable transduction of force and motion in MEMS devices via frequency readout.

Proceedings Title

Proceedings, Solid State Sensor, Actuator and Microsystems Workshop

Conference Dates

June 3-7, 2018

Conference Location

Hilton Head Island, SC, US

Pub Type

Conferences

Download Paper

https://doi.org/10.31438/trf.hh2018.93

Local Download

Keywords

NEMS, resonator, thermal sensitivity

Citation

Zhang, R. , Ilic, R. , Liu, Y. and Aksyuk, V. (2018), Nanoscale tuning fork cavity optomechanical transducers with design-enabled frequency tuning and temperature compensation, Proceedings, Solid State Sensor, Actuator and Microsystems Workshop , Hilton Head Island, SC, US, [online], https://doi.org/10.31438/trf.hh2018.93, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925646 (Accessed October 13, 2025)