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Nanoscale Focused Ion Beam from Laser-cooled Lithium Atoms



Brenton J. Knuffman, Adam V. Steele, Jon Orloff, Jabez J. McClelland


To advance the capabilities of focused ion beam (FIB) technology, we have created a low-energy FIB from photoionized lithium atoms collected in a magneto-optical trap (MOT). This magneto-optical trap ion source relies on both the low temperature of the laser-cooled atoms and the small energy spread of the resultant beam to form a nanoscale ion probe at its focus. We present examples of microscopy with lithium ions obtained by scanning the FIB and collecting the resulting secondary electrons. The size of the beam focus has been characterized with a rise distance measurement to be d_{25/75} = 26.7 +/- 1.0 nm at a beam energy of 2 keV. We have also characterized the focal size as a function of temperature of atoms in the MOT and beam energy.
New Journal of Physics


MOTIS, FIB, focused ion beam, laser cooling, magneto-optical trap, ion source, nanotechnology, microscopy
Created October 26, 2011, Updated February 19, 2017