Nanoporous Polymer Film Properties From Brillouin Light Scattering and Surface Acoustic Wave Spectroscopy

Published

October 1, 2002

Author(s)

Colm Flannery, Sudook A. Kim, T Wittkowski, K Y. Jung, B Hillebrands, M R. Baklanov

Abstract

Nanoporous Methylsilsesquioxane polymer films have outstanding potential forapplication to microelectronic interconnect, because of their low dielectric constant. Here we show that Brillouin light scattering and surface acoustic wave spectroscopy may be applied to characterise hard-to-measure properties - density/porosity, Young's modulus - of a range of polymer films from different sources. Porosity-stiffness dependences are investigated, as wellas relationship to dielectric constant. Information about pore size and Poisson's ratio may also be gained, as well as showing difficulties with nanoindentation measurements.

Proceedings Title

Ultrasonics Symposium | | 2002 IEEE Ultrasonics Symposium | IEEE

Volume

2002

Issue

1

Conference Dates

October 1, 2002

Conference Location

Munich, GE

Conference Title

IEEE Ultrasonics Symposium

Pub Type

Conferences

Keywords

Brillouin spectroscopy, laser ultrasound, nanoporous films, polymer films, porosity, Young's modulus

Citation

Flannery, C. , Kim, S. , Wittkowski, T. , Jung, K. , Hillebrands, B. and Baklanov, M. (2002), Nanoporous Polymer Film Properties From Brillouin Light Scattering and Surface Acoustic Wave Spectroscopy, Ultrasonics Symposium | | 2002 IEEE Ultrasonics Symposium | IEEE, Munich, GE (Accessed October 21, 2025)