Skip to main content

NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Nanoporous Polymer Film Properties From Brillouin Light Scattering and Surface Acoustic Wave Spectroscopy

Published

Author(s)

Colm Flannery, Sudook A. Kim, T Wittkowski, K Y. Jung, B Hillebrands, M R. Baklanov

Abstract

Nanoporous Methylsilsesquioxane polymer films have outstanding potential forapplication to microelectronic interconnect, because of their low dielectric constant. Here we show that Brillouin light scattering and surface acoustic wave spectroscopy may be applied to characterise hard-to-measure properties - density/porosity, Young's modulus - of a range of polymer films from different sources. Porosity-stiffness dependences are investigated, as wellas relationship to dielectric constant. Information about pore size and Poisson's ratio may also be gained, as well as showing difficulties with nanoindentation measurements.
Proceedings Title
Ultrasonics Symposium | | 2002 IEEE Ultrasonics Symposium | IEEE
Volume
2002
Issue
1
Conference Dates
October 1, 2002
Conference Location
Munich, GE
Conference Title
IEEE Ultrasonics Symposium

Keywords

Brillouin spectroscopy, laser ultrasound, nanoporous films, polymer films, porosity, Young's modulus

Citation

Flannery, C. , Kim, S. , Wittkowski, T. , Jung, K. , Hillebrands, B. and Baklanov, M. (2002), Nanoporous Polymer Film Properties From Brillouin Light Scattering and Surface Acoustic Wave Spectroscopy, Ultrasonics Symposium | | 2002 IEEE Ultrasonics Symposium | IEEE, Munich, GE (Accessed October 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 1, 2002, Updated February 17, 2017
Was this page helpful?