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Nanoporous Polymer Film Properties From Brillouin Light Scattering and Surface Acoustic Wave Spectroscopy
Published
Author(s)
Colm Flannery, Sudook A. Kim, T Wittkowski, K Y. Jung, B Hillebrands, M R. Baklanov
Abstract
Nanoporous Methylsilsesquioxane polymer films have outstanding potential forapplication to microelectronic interconnect, because of their low dielectric constant. Here we show that Brillouin light scattering and surface acoustic wave spectroscopy may be applied to characterise hard-to-measure properties - density/porosity, Young's modulus - of a range of polymer films from different sources. Porosity-stiffness dependences are investigated, as wellas relationship to dielectric constant. Information about pore size and Poisson's ratio may also be gained, as well as showing difficulties with nanoindentation measurements.
Flannery, C.
, Kim, S.
, Wittkowski, T.
, Jung, K.
, Hillebrands, B.
and Baklanov, M.
(2002),
Nanoporous Polymer Film Properties From Brillouin Light Scattering and Surface Acoustic Wave Spectroscopy, Ultrasonics Symposium | | 2002 IEEE Ultrasonics Symposium | IEEE, Munich, GE
(Accessed October 14, 2025)