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Nanoporous Polymer Film Properties From Brillouin Light Scattering and Surface Acoustic Wave Spectroscopy

Published

Author(s)

Colm Flannery, Sudook A. Kim, T Wittkowski, K Y. Jung, B Hillebrands, M R. Baklanov

Abstract

Nanoporous Methylsilsesquioxane polymer films have outstanding potential forapplication to microelectronic interconnect, because of their low dielectric constant. Here we show that Brillouin light scattering and surface acoustic wave spectroscopy may be applied to characterise hard-to-measure properties - density/porosity, Young's modulus - of a range of polymer films from different sources. Porosity-stiffness dependences are investigated, as wellas relationship to dielectric constant. Information about pore size and Poisson's ratio may also be gained, as well as showing difficulties with nanoindentation measurements.
Proceedings Title
Ultrasonics Symposium | | 2002 IEEE Ultrasonics Symposium | IEEE
Volume
2002
Issue
1
Conference Dates
October 1, 2002
Conference Location
Munich, GE
Conference Title
IEEE Ultrasonics Symposium

Keywords

Brillouin spectroscopy, laser ultrasound, nanoporous films, polymer films, porosity, Young's modulus

Citation

Flannery, C. , Kim, S. , Wittkowski, T. , Jung, K. , Hillebrands, B. and Baklanov, M. (2002), Nanoporous Polymer Film Properties From Brillouin Light Scattering and Surface Acoustic Wave Spectroscopy, Ultrasonics Symposium | | 2002 IEEE Ultrasonics Symposium | IEEE, Munich, GE (Accessed July 14, 2024)

Issues

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Created October 1, 2002, Updated February 17, 2017