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Nanometrology - FY 2004 Programs and Selected Accomplishments

Published

Author(s)

C M. Allocca

Abstract

The MSEL Nanometrology Program incorporates basic measurement metrologies to determine material properties, process monitoring at the nanoscale, nano-manufacturing and fabrication techniques, and structural characterization and analysis techniques, such as advanced imaging and multiscale modeling. The Program comprises 22 projects in the Ceramics, Materials Reliability, Metallurgy and Polymers Division, and includes structural characterization using neutron scattering at the NIST Center for Neutron Research (NCNR). The projects cover a wide range of measurement and characterization methods grouped into the areas of mechanical property measurement, chemical and structural characterization and imaging, fabrication and monitoring of nanoproceses and events, and modeling of nanoscale properties. IN each area, we work to advance basic measurement capabilities and lead the intercomparison, standardization , and calibration of test methods. The newly completed Advanced Measurement Laboratory at the NIST Gaithersburg site provides an incomparable environment for accurate nonmusical metrology.
Citation
NIST Interagency/Internal Report (NISTIR) - 7130
Report Number
7130

Keywords

ceramics, metals, nanocharacterization, nanoelectronics, nanomechanics, nanometrology, nanotechnology, polymers
Created April 15, 2005, Updated February 19, 2017