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Nanometre scale dimensional measurements

Published

Author(s)

Ndubuisi G. Orji, Bryan M. Barnes
Citation
Nature Research Device and Materials Engineering Community

Keywords

Nanometrology, Nanoelectronics

Citation

Orji, N. and Barnes, B. (2018), Nanometre scale dimensional measurements, Nature Research Device and Materials Engineering Community, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927066, https://devicematerialscommunity.nature.com/ (Accessed May 21, 2022)
Created November 13, 2018, Updated January 27, 2020