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PUBLICATIONS

Nanometre scale dimensional measurements

Published

Author(s)

Ndubuisi G. Orji, Bryan M. Barnes
Citation
Nature Research Device and Materials Engineering Community
Pub Weblink
https://devicematerialscommunity.nature.com/
Pub Type
Websites

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Keywords

Nanometrology, Nanoelectronics
Nanoelectronics and Nanometrology

Citation

Orji, N. and Barnes, B. (2018), Nanometre scale dimensional measurements, Nature Research Device and Materials Engineering Community, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927066, https://devicematerialscommunity.nature.com/ (Accessed April 25, 2024)

Created November 13, 2018, Updated January 27, 2020