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Nanometre scale dimensional measurements

Published

Author(s)

Ndubuisi G. Orji, Bryan M. Barnes
Citation
Nature Research Device and Materials Engineering Community

Keywords

Nanometrology, Nanoelectronics

Citation

Orji, N. and Barnes, B. (2018), Nanometre scale dimensional measurements, Nature Research Device and Materials Engineering Community, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927066, https://devicematerialscommunity.nature.com/ (Accessed December 13, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 13, 2018, Updated January 27, 2020