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Nanometer Scale Crystallographic Texture Mapping of Platinum and Lead Zirconate Titanate Thin Films by Electron Backscatter Diffraction

Published

Author(s)

G R. Fox, X Han, T Maitland, Mark D. Vaudin
Citation
Applied Physics Letters

Keywords

electron backscatter diffraction, ferroelectric random access memory, local texture, PZT thin films

Citation

Fox, G. , Han, X. , Maitland, T. and Vaudin, M. (2006), Nanometer Scale Crystallographic Texture Mapping of Platinum and Lead Zirconate Titanate Thin Films by Electron Backscatter Diffraction, Applied Physics Letters (Accessed June 22, 2024)

Issues

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Created March 8, 2006, Updated October 12, 2021