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Nanometer Scale Crystallographic Texture Mapping of Platinum and Lead Zirconate Titanate Thin Films by Electron Backscatter Diffraction
Published
Author(s)
G R. Fox, X Han, T Maitland, Mark D. Vaudin
Citation
Applied Physics Letters
Pub Type
Journals
Keywords
electron backscatter diffraction, ferroelectric random access memory, local texture, PZT thin films
Citation
Fox, G.
, Han, X.
, Maitland, T.
and Vaudin, M.
(2006),
Nanometer Scale Crystallographic Texture Mapping of Platinum and Lead Zirconate Titanate Thin Films by Electron Backscatter Diffraction, Applied Physics Letters
(Accessed November 3, 2025)