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Nanolithography on III-V Semiconductor Surfaces Using a Scanning Tunneling Microscope Operating in Air

Published

Author(s)

John A. Dagata, W. F. Tseng, J. Bennett, J. Schneir, Howard H. Harary
Citation
Journal of Applied Physics
Volume
70
Issue
7

Citation

Dagata, J. , Tseng, W. , Bennett, J. , Schneir, J. and Harary, H. (1991), Nanolithography on III-V Semiconductor Surfaces Using a Scanning Tunneling Microscope Operating in Air, Journal of Applied Physics (Accessed April 13, 2024)
Created September 30, 1991, Updated October 12, 2021