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Nanofabrication via Atom Optics with Chromium



Jabez J. McClelland, W Anderson, Robert Celotta


Through the use of light forces exerted by near-resonant laser light, chromium atoms are focused as they deposit onto a substrate, forming nanometer-scale structures on the surface. The laser light is in the form of a standing wave, in which each node acts as an atom-optical "lens." The result is a highly accurate array of lines with a periodicity of λ/2 = 212.78 nm and full-width at half maximum as small as 38 nm. We discuss progress with this process, in particular the fabrication of a two-dimensional array, the creation of an array with λ/8 periodicity, the replication of the array in polymer material, the production of magnetic nanowires, and the reactive-ion etching of a chromium pattern on silicon to generate an array of distinct nanowires and/or nanotrenches.
Conference Dates
February 1-28, 1997
Conference Location
San Jose, CA
Conference Title


McClelland, J. , Anderson, W. and Celotta, R. (1997), Nanofabrication via Atom Optics with Chromium, SPIE, San Jose, CA, [online], (Accessed April 16, 2024)
Created February 10, 1997, Updated February 19, 2017