Nanofabrication via Atom Optics with Chromium

Published

February 10, 1997

Author(s)

Jabez J. McClelland, W Anderson, Robert Celotta

Abstract

Through the use of light forces exerted by near-resonant laser light, chromium atoms are focused as they deposit onto a substrate, forming nanometer-scale structures on the surface. The laser light is in the form of a standing wave, in which each node acts as an atom-optical "lens." The result is a highly accurate array of lines with a periodicity of λ/2 = 212.78 nm and full-width at half maximum as small as 38 nm. We discuss progress with this process, in particular the fabrication of a two-dimensional array, the creation of an array with λ/8 periodicity, the replication of the array in polymer material, the production of magnetic nanowires, and the reactive-ion etching of a chromium pattern on silicon to generate an array of distinct nanowires and/or nanotrenches.

Conference Dates

February 1-28, 1997

Conference Location

San Jose, CA

Conference Title

SPIE

Pub Type

Conferences

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Citation

McClelland, J. , Anderson, W. and Celotta, R. (1997), Nanofabrication via Atom Optics with Chromium, SPIE, San Jose, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620481 (Accessed October 16, 2025)