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A review is given of the field of nanofabrication via atom optics. Discussion is presented of the fundamentals of atom manipulation and atom optics, with emphasis on the aspects that are, or might be, useful for nanofabrication. The current status of nanofabrication with atom optics is presented, with discussion of the demonstrations that have been described in the literature so far. Possible future directions for the field are discussed.
Citation
Handbook of Nanostructured Materials and Nanotechnology, Vol 1
atom lithography, atom optics, chromium, deposition, laser-focused, nanofabrication, nanostructures
Citation
McClelland, J.
(2000),
Nanofabrication via Atom Optics, Handbook of Nanostructured Materials and Nanotechnology, Vol 1, Academic Press, San Diego, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620491
(Accessed December 15, 2024)