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Molecular Devices formed by Direct Monolayer Attachment to Silicon



Curt A. Richter, Christina A. Hacker, Lee J. Richter


We present the results of studies of solution-based attachment of long-chain aliphatic molecules to hydrogen-terminated Si surfaces formed to pursue the electrical properties of organic monolayers and as a first step towards creating hybrid silicon-molecular nanoelectronic devices. Direct attachment of organic molecules to the silicon surface is of increasing importance for emerging molecular electronics applications as devices incorporating molecules chemically bonded to silicon are amenable to integration with existing Si processing techniques. Current-voltage and capacitance-voltage measurements were obtained from a metal-organic-silicon test structure fabricated by post-monolayer metal deposition. The effect of differing alkane chain length on the electrical properties was measured. To investigate the quality of the organic monolayers measured in these devices, they were physically and chemically characterized with infrared spectroscopy, spectroscopic ellipsometry, and contact angle measurements.
Proceedings Title
Proceedings of the International Semiconductor Device Research Symposium
Conference Dates
December 10-12, 2003
Conference Location
Washington, DC
Conference Title
2003 International Semiconductor Device Research Symposium


capacitance-voltage, Molecular Electronics, nanoelectronics, self-assembled monolayers, silicon


Richter, C. , Hacker, C. and Richter, L. (2003), Molecular Devices formed by Direct Monolayer Attachment to Silicon, Proceedings of the International Semiconductor Device Research Symposium, Washington, DC (Accessed June 17, 2024)


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Created December 10, 2003, Updated February 17, 2017