This paper discusses the modeling and control of a nanopositioning flexure hinge mechanism with a piezoelectric actuator. A complete dynamic model for the mechanism is presented along with experimentally determined system parameters. The control design concentrates on the problem of controlling the nanopositioner when a base excitation is injected into the system. The effects of the base excitation are overcome using two approaches. The first is a robust tracking controller which is developed to cancel the excitation effect on the tracking error. The second is an inertial compensator which is designed to update the desired trajectory using base motion measurements, such that the nanopositioner performs the desired trajectory in an inertial frame. This approach is demonstrated through simulation results. These principals are being developed for use in beam steering applications which require nanoradian resolution and very low beam jitter.
Proceedings Title: Proceedings of IMECE''03 2003 ASME International Mechanical Engineering Congress
Conference Dates: November 15-21, 2003
Conference Location: Washington DC, MD
Conference Title: ASME International Mechanical Engineering Congress
Pub Type: Conferences
base excitation, beam jitter, beam steering, Control, distrubance rejection, Micro/Nano Systems, nanopositioning