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Mode localization and tunable overlap in a closed-chain micromechanical resonator array

Published

Author(s)

Joon Hyong Cho, Michael Cullinan, Jason J. Gorman

Abstract

In this paper, we explore the dynamics of a closed chain of coupled micromechanical resonators, where each resonator is coupled to its two nearest neighbors. The design of a three-resonator array that combines silicon cantilevers with piezoelectric actuation and electrostatic coupling is first introduced. The dynamic behavior of the array is then presented for two voltage schemes for coupling the resonators, demonstrating complex amplitude and frequency dependence that may be useful for sensing applications. Finally, it is shown that analog feedback can induce mode localization in the array and collapse two coupled modes into a single mode, which could provide high sensitivity to external perturbations.
Conference Dates
June 5-9, 2022
Conference Location
Hilton Head, SC, US
Conference Title
Hilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop

Keywords

Coupled resonators, mode localization, resonator array, piezoelectric.

Citation

Cho, J. , Cullinan, M. and Gorman, J. (2022), Mode localization and tunable overlap in a closed-chain micromechanical resonator array, Hilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934749 (Accessed April 17, 2024)
Created June 9, 2022, Updated November 29, 2022