Cho, J.
, Cullinan, M.
and Gorman, J.
(2022),
Mode localization and tunable overlap in a closed-chain micromechanical resonator array, Hilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934749
(Accessed April 23, 2024)
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Mode localization and tunable overlap in a closed-chain micromechanical resonator array
Published
Author(s)
Joon Hyong Cho, Michael Cullinan,
Abstract
In this paper, we explore the dynamics of a closed chain of coupled micromechanical resonators, where each resonator is coupled to its two nearest neighbors. The design of a three-resonator array that combines silicon cantilevers with piezoelectric actuation and electrostatic coupling is first introduced. The dynamic behavior of the array is then presented for two voltage schemes for coupling the resonators, demonstrating complex amplitude and frequency dependence that may be useful for sensing applications. Finally, it is shown that analog feedback can induce mode localization in the array and collapse two coupled modes into a single mode, which could provide high sensitivity to external perturbations.Conference Dates
June 5-9, 2022
Conference Location
Hilton Head, SC, US
Conference Title
Hilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop
Pub Type
Conferences
Download Paper
Keywords
Coupled resonators, mode localization, resonator array, piezoelectric.
Citation
Created June 9, 2022, Updated November 29, 2022