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Microwave Characterization of Semiconductors with a Split-Cylinder Cavity
Published
Author(s)
Billy F. Riddle, James R. Baker-Jarvis, Michael D. Janezic
Abstract
In this paper we demonstrate the use of a split-cylinder cavity for characterizing semiconductors over a temperature range of 173 K (-100oC) to 373 K (+100oC) at microwave frequencies (9-30 GHz). Complex permittivity measurements of silicon (Si) and gallium arsenide (GaAs) wafers are presented in order to evaluate the cavity's performance with this type of material.
Riddle, B.
, Baker-Jarvis, J.
and Janezic, M.
(2008),
Microwave Characterization of Semiconductors with a Split-Cylinder Cavity, IEEE Journal of Quantum Electronics
(Accessed October 10, 2025)