Micromechanical Testing of Electroplated Gold Alloy Films using Theta-Like Specimens
Mark McLean, William A. Osborn, Oliver Boomhower, Christopher Keimel, Rebecca Kirkpatrick, Frank W. DelRio
Micromechanical testing of electroplated gold alloy films has been conducted using the theta specimen geometry. Specimens were formed by a standard combination of photolithography, electroplating, and deep reactive ion etching. Testing was performed using an instrumented indenter and the results interpreted using a finite element model with a Ramberg-Osgood constitutive law to extract both elastic and plastic material properties. The results of the tests were highly repeatable and appear to be sensitive to variations in both sample dimensions and material properties. These qualities suggest that the testing methodology may have significant value as a quality control technique in the fabrication of metal microelectromechanical systems.
, Osborn, W.
, Boomhower, O.
, Keimel, C.
, Kirkpatrick, R.
and DelRio, F.
Micromechanical Testing of Electroplated Gold Alloy Films using Theta-Like Specimens, MRS Communications, [online], https://doi.org/10.1557/mrc.2015.48
(Accessed December 11, 2023)