Gaitan, M.
(2000),
MicroHotplate Devices and Arrays, Pt. 1: Thermal Flat Panel displays and MicroReaders, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed October 11, 2024)
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MicroHotplate Devices and Arrays, Pt. 1: Thermal Flat Panel displays and MicroReaders
Published
Author(s)
Abstract
Microheating elements and microhotplates are bulk silicon micromachined integrated circuit (IC) devices. The fabrication approach that we use utilizes full custom designed commercial foundry fabricated application specific Ics (ASICs) that contain the precursors of the microheating elements. The ASICs are bulk silicon micromachined as a post-process of the IC fabrication process to create the final device structures.Citation
NIST Interagency/Internal Report (NISTIR) - 6572
Report Number
6572
NIST Pub Series
Pub Type
NIST Pubs
Keywords
microhotplate devices and arrays, thermal flat panel displays, microreactors, bulk siliconmicromachining, integrated circuits, IC, microheating element
Citation
Issues
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Created October 11, 2000, Updated October 16, 2008