MicroHotplate Devices and Arrays, Pt. 1: Thermal Flat Panel displays and MicroReaders
Microheating elements and microhotplates are bulk silicon micromachined integrated circuit (IC) devices. The fabrication approach that we use utilizes full custom designed commercial foundry fabricated application specific Ics (ASICs) that contain the precursors of the microheating elements. The ASICs are bulk silicon micromachined as a post-process of the IC fabrication process to create the final device structures.
microhotplate devices and arrays, thermal flat panel displays, microreactors, bulk siliconmicromachining, integrated circuits, IC, microheating element
MicroHotplate Devices and Arrays, Pt. 1: Thermal Flat Panel displays and MicroReaders, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed June 10, 2023)