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MicroHotplate Devices and Arrays, Pt. 1: Thermal Flat Panel displays and MicroReaders

Published

Author(s)

Michael Gaitan

Abstract

Microheating elements and microhotplates are bulk silicon micromachined integrated circuit (IC) devices. The fabrication approach that we use utilizes full custom designed commercial foundry fabricated application specific Ics (ASICs) that contain the precursors of the microheating elements. The ASICs are bulk silicon micromachined as a post-process of the IC fabrication process to create the final device structures.
Citation
NIST Interagency/Internal Report (NISTIR) - 6572
Report Number
6572

Keywords

microhotplate devices and arrays, thermal flat panel displays, microreactors, bulk siliconmicromachining, integrated circuits, IC, microheating element

Citation

Gaitan, M. (2000), MicroHotplate Devices and Arrays, Pt. 1: Thermal Flat Panel displays and MicroReaders, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed February 21, 2024)
Created October 11, 2000, Updated October 16, 2008