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MicroHotplate Devices and Arrays, Pt. 1: Thermal Flat Panel displays and MicroReaders



Michael Gaitan


Microheating elements and microhotplates are bulk silicon micromachined integrated circuit (IC) devices. The fabrication approach that we use utilizes full custom designed commercial foundry fabricated application specific Ics (ASICs) that contain the precursors of the microheating elements. The ASICs are bulk silicon micromachined as a post-process of the IC fabrication process to create the final device structures.
NIST Interagency/Internal Report (NISTIR) - 6572
Report Number


microhotplate devices and arrays, thermal flat panel displays, microreactors, bulk siliconmicromachining, integrated circuits, IC, microheating element


Gaitan, M. (2000), MicroHotplate Devices and Arrays, Pt. 1: Thermal Flat Panel displays and MicroReaders, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed June 15, 2024)


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Created October 11, 2000, Updated October 16, 2008